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Nanofabrication using focused ion and electron beams : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.

Contributor(s): Utke, Ivo | Moshkalev, Stanislav | Russell, Phillip, 1955-.
Series: Nanomanufacturing series ; v. 1.Publisher: Oxford ; New York : Oxford University Press, 2012Description: xvi, 813 p. : ill. ; 27 cm.ISBN: 9780199734214 (hardcover : alk. paper).Subject(s): Nanostructured materials | Nanotechnology | Electron beams -- Industrial applications | Ion bombardment -- Industrial applicationsDDC classification: 620.1/15 Online resources: Full-text here
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Item type Current location Call number Status Date due Barcode Item holds
E-Book Skoltech library
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TA418.9.N35 N2525 2012 (Browse shelf) Available
Total holds: 0

Includes bibliographical references and index.

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