Nanofabrication using focused ion and electron beams : principles and applications /
edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.
- Oxford ; New York : Oxford University Press, 2012.
- xvi, 813 p. : ill. ; 27 cm.
- Nanomanufacturing series ; v. 1 .
Includes bibliographical references and index.
9780199734214 (hardcover : alk. paper)
2011028174
Nanostructured materials.
Nanotechnology.
Electron beams--Industrial applications.
Ion bombardment--Industrial applications.
TA418.9.N35 / N2525 2012
620.1/15
Includes bibliographical references and index.
9780199734214 (hardcover : alk. paper)
2011028174
Nanostructured materials.
Nanotechnology.
Electron beams--Industrial applications.
Ion bombardment--Industrial applications.
TA418.9.N35 / N2525 2012
620.1/15
