| 000 | 02694cam a22003854a 4500 | ||
|---|---|---|---|
| 999 |
_c4138 _d4138 |
||
| 001 | 16786538 | ||
| 005 | 20200207142633.0 | ||
| 008 | 110519s2012 flua b 001 0 eng | ||
| 010 |
_a 2011014406 _z 2011014404 _z 2011014405 |
||
| 020 | _a9781420055191 (v. 2) | ||
| 035 | _a(OCoLC)ocn727047810 | ||
| 040 |
_aDLC _cDLC _dYDX _dYDXCP _dCDX _dCOO _dMYPMP _dDLC |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.M33 2012 |
| 082 | 0 | 0 |
_a620/.5 _223 |
| 084 |
_aTEC027000 _aTEC008070 _aSCI077000 _2bisacsh |
||
| 100 | 1 | _aMadou, Marc J. | |
| 245 | 1 | 0 |
_aFundamentals of microfabrication and nanotechnology / _cMarc J. Madou. |
| 246 | 3 | 0 | _aSolid-state physics, fluidics, and analytical techniques in micro- and nanotechnology |
| 250 | _a3rd ed. | ||
| 260 |
_aBoca Raton, FL : _bCRC Press, _cc2012. |
||
| 300 |
_a3 v. : _bill. (some col.) ; _c29 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 | _av. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications. | |
| 520 | _a"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"-- | ||
| 520 | _a"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"-- | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aNanoelectromechanical systems. | |
| 650 | 0 | _aMicrofluidics. | |
| 650 | 0 | _aSolid state physics. | |
| 856 |
_uhttps://ebookcentral.proquest.com/lib/skolkovoru/detail.action?docID=5535346 _zFull-text here |
||
| 906 |
_a7 _bcbc _corignew _d1 _eecip _f20 _gy-gencatlg |
||
| 942 |
_2lcc _cBK |
||