| 000 | 01520cam a2200337 a 4500 | ||
|---|---|---|---|
| 999 |
_c4035 _d4035 |
||
| 001 | 16908799 | ||
| 005 | 20220831092118.0 | ||
| 008 | 110808s2012 enka b 001 0 eng | ||
| 010 | _a 2011028174 | ||
| 020 | _a9780199734214 (hardcover : alk. paper) | ||
| 040 |
_aDLC _cDLC |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTA418.9.N35 _bN2525 2012 |
| 082 | 0 | 0 |
_a620.1/15 _223 |
| 245 | 0 | 0 |
_aNanofabrication using focused ion and electron beams : _bprinciples and applications / _cedited by Ivo Utke, Stanislav Moshkalev, Phillip Russell. |
| 260 |
_aOxford ; _aNew York : _bOxford University Press, _c2012. |
||
| 300 |
_axvi, 813 p. : _bill. ; _c27 cm. |
||
| 490 | 0 |
_aNanomanufacturing series ; _vv. 1 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aNanostructured materials. | |
| 650 | 0 | _aNanotechnology. | |
| 650 | 0 |
_aElectron beams _xIndustrial applications. |
|
| 650 | 0 |
_aIon bombardment _xIndustrial applications. |
|
| 700 | 1 | _aUtke, Ivo. | |
| 700 | 1 | _aMoshkalev, Stanislav. | |
| 700 | 1 |
_aRussell, Phillip, _d1955- |
|
| 856 |
_3Full-text here _uhttps://box.skoltech.ru/index.php/apps/files/?dir=/e-books%20library/Nanofabrication%20Using%20Focused%20Ion%20and%20Electron%20Beams%3A%20Principles%20and%20Applications.%20Edited%20by%20I.%20Utke%2C%20S.%20Moshkalev%2C%20P.%20Russell%2C%20&fileid=8337733#pdfviewer |
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| 906 |
_a7 _bcbc _corignew _d1 _eecip _f20 _gy-gencatlg |
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| 942 |
_2lcc _cEB |
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