| 000 | 01158cam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | 4908719 | ||
| 005 | 20180515110946.0 | ||
| 008 | 941220s1995 nyua b 001 0 eng | ||
| 010 | _a 94047002 | ||
| 020 | _a0070585024 | ||
| 020 | _a0071139133 (International ed.) | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 050 | 0 | 0 |
_aTA418.9.T45 _bS65 1995 |
| 082 | 0 | 0 |
_a621.3815/2 _220 |
| 100 | 1 |
_aSmith, Donald L. _q(Donald Leonard), _d1944- |
|
| 245 | 1 | 0 |
_aThin-film deposition : _bprinciples and practice / _cDonald L. Smith. |
| 260 |
_aNew York : _bMcGraw-Hill, _cc1995. |
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| 300 |
_axxiii, 616 p. : _bill. ; _c24 cm. |
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| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aThin films. | |
| 650 | 0 | _aVapor-plating. | |
| 650 | 0 | _aThin film devices. | |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/mh022/94047002.html |
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy1012/94047002-b.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 942 |
_2lcc _cBK |
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| 999 |
_c4010 _d4010 |
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