SKOLKOVO Library

SKOLKOVO School of Management

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Fundamentals of microfabrication and nanotechnology / Marc J. Madou.

by Madou, Marc J.

Edition: 3rd ed.Publisher: Boca Raton, FL : CRC Press, c2012Other title: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology.Online access: Full-text here Availability: Items available for loan: Skoltech library [Call number: TK7875 .M33 2012] (3).
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Fundamentals of microfabrication and nanotechnology / Marc J. Madou. Solid-State Physics, Volume 1. Fluidics, and Analytical Techniques in Micro- and Nanotechnology

by Madou, Marc J.

Edition: 3rd ed.Publisher: Boca Raton, FL : CRC Press, c2012Other title: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology.Online access: Full-text here Availability: Items available for loan: Skoltech library [Call number: TK7875 .M33 2012] (3).