Fundamentals of microfabrication and nanotechnology / Marc J. Madou.
By: Madou, Marc J.
Publisher: Boca Raton, FL : CRC Press, c2012Edition: 3rd ed.Description: 3 v. : ill. (some col.) ; 29 cm.ISBN: 9781420055191 (v. 2).Other title: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology.Subject(s): Microelectromechanical systems | Nanoelectromechanical systems | Microfluidics | Solid state physicsDDC classification: 620/.5 Other classification: TEC027000 | TEC008070 | SCI077000 Online resources: Full-text here| Item type | Current location | Call number | Status | Date due | Barcode | Item holds |
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| Book | Skoltech library Shelves | TK7875 .M33 2012 (Browse shelf) | Available | 2000007614 | ||
| Book | Skoltech library Shelves | TK7875 .M33 2012 (Browse shelf) | Available | 2000006936 | ||
| Book | Skoltech library Shelves | TK7875 .M33 2012 (Browse shelf) | Available | 2000006935 |
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| TK7874.887 .B36 2016 Introduction to spintronics / | TK7874.887 .H36 2012 Handbook of spin transport and magnetism / | TK7874.887 .H36 2012 Handbook of spin transport and magnetism / | TK7875 .M33 2012 Fundamentals of microfabrication and nanotechnology / | TK7875 .M33 2012 Fundamentals of microfabrication and nanotechnology / | TK7875 .M33 2012 Fundamentals of microfabrication and nanotechnology / | TK7875 .M33 2012 Fundamentals of microfabrication and nanotechnology / |
Includes bibliographical references and index.
v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
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